JOURNAL ARTICLE
Approaching performance limits in silicon piezoresistive pressure sensors
Year: 1983 Journal: Sensors and Actuators Vol: 4 Pages: 669-678 Publisher: Elsevier BV
Keywords:
Piezoresistive effect Silicon Pressure sensor Materials science Electrical engineering Optoelectronics Nanotechnology Engineering Mechanical engineering
Metrics
6
Cited By
0.00
FWCI (Field Weighted Citation Impact)
2
Refs
0.10
Citation Normalized Percentile
Is in top 1%
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Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
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