High performance piezoresistive low pressure sensors

L. Li; Николай Витальевич Белов; Michael Klitzke; Jong Soo Park

doi:10.1109/icsens.2016.7808875

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High performance piezoresistive low pressure sensors

L. Li Николай Витальевич Белов Michael Klitzke Jong Soo Park

Year: 2016

DOI: 10.1109/icsens.2016.7808875

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Abstract

High performance piezoresistive low pressure sensors have been developed. The MEMS die has high sensitivity, superior linearity, low temperature dependence of output signal and excellent environmental stability. Small die size allows for the world's smallest packaged low pressure sensor solution.

Keywords:

Piezoresistive effect Linearity Materials science Microelectromechanical systems Sensitivity (control systems) Pressure sensor SIGNAL (programming language) Optoelectronics Electrical engineering Electronic engineering Mechanical engineering Engineering Computer science

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Topics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Sensor Technology and Measurement Systems

Physical Sciences → Computer Science → Computer Networks and Communications

Semiconductor Lasers and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

High performance piezoresistive low pressure sensors

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