Temperature measurement using silicon piezoresistive MEMS pressure sensors

Abstract

In industrial processes, as well as in many other fields from vehicles to healthcare, temperature and pressure are the most common parameters to be measured and monitored. Silicon microelectromechanical (MEMS) piezoresistive pressure sensors are the first and the most successful MEMS sensors, widely used in the industry in various measurement configurations. The inherent temperature dependence of the output signal of such sensors adversely affects their pressure measurement performance. However, it can be utilized for temperature measurement, thus enabling new sensor applications. In this paper a method is presented for temperature measurement using MEMS piezoresistive pressure sensors.