JOURNAL ARTICLE

Characterization of MEMS piezoresistive pressure sensors using AFM

Keywords:
Piezoresistive effect Microelectromechanical systems Diaphragm (acoustics) Materials science Cantilever Pressure sensor Contact force Voltage Resistor Kelvin probe force microscope Optoelectronics Atomic force microscopy Non-contact atomic force microscopy Nanotechnology Electrical engineering Acoustics Composite material Vibration Mechanical engineering

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17
Cited By
0.95
FWCI (Field Weighted Citation Impact)
18
Refs
0.78
Citation Normalized Percentile
Is in top 1%
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Citation History

Topics

Force Microscopy Techniques and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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