Characterization of MEMS piezoresistive pressure sensors using AFM

Suraj Kumar Patil; Zeynep Çelik‐Butler; Donald P. Butler

doi:10.1016/j.ultramic.2010.04.012

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Characterization of MEMS piezoresistive pressure sensors using AFM

Suraj Kumar Patil Zeynep Çelik‐Butler Donald P. Butler

Year: 2010 Journal: Ultramicroscopy Vol: 110 (9)Pages: 1154-1160 Publisher: Elsevier BV

DOI: 10.1016/j.ultramic.2010.04.012

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Keywords:

Piezoresistive effect Microelectromechanical systems Diaphragm (acoustics) Materials science Cantilever Pressure sensor Contact force Voltage Resistor Kelvin probe force microscope Optoelectronics Atomic force microscopy Non-contact atomic force microscopy Nanotechnology Electrical engineering Acoustics Composite material Vibration Mechanical engineering

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Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Characterization of MEMS piezoresistive pressure sensors using AFM

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