Accuracy improvement for MEMS Piezoresistive Pressure Sensors

Abstract

Accurate measurement of pressure using piezoresistive MEMS sensors requires proper quantification and correction of its errors. Algorithmic temperature compensation of such a pressure sensor gives an accuracy that is one order better than resistive-compensation, but it is a time-consuming process. This paper discusses a MATLAB-based method to extract the correction coefficients for a MEMS pressure sensor and evaluates the extent of their effectiveness before they are fed into the system and experimented in hardware. The contribution of non-linearity error is analyzed and reduced. A method to improve the match between sensors as required in some aerospace applications is also discussed.