Piezoresistive pressure sensors based on polycrystalline silicon

V. Mosser; J. Suski; Jonathan P. Goss; Ε. Obermeier

doi:10.1016/0924-4247(91)85020-o

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Piezoresistive pressure sensors based on polycrystalline silicon

V. Mosser J. Suski Jonathan P. Goss Ε. Obermeier

Year: 1991 Journal: Sensors and Actuators A Physical Vol: 28 (2)Pages: 113-132 Publisher: Elsevier BV

DOI: 10.1016/0924-4247(91)85020-o

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Keywords:

Piezoresistive effect Microelectronics Materials science Fabrication Polycrystalline silicon Substrate (aquarium) Silicon Crystallite Optoelectronics Gauge factor Pressure sensor Composite material Mechanical engineering Thin-film transistor

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Piezoresistive pressure sensors based on polycrystalline silicon

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