BOOK-CHAPTER
Thin Film MEMS
Tomoaki MatsushimaIsaku KannoKiyotaka Wasa
Year: 2012 Elsevier eBooks Pages: 559-596 Publisher: Elsevier BV
Keywords:
Microelectromechanical systems Materials science Nanotechnology
Metrics
3
Cited By
0.00
FWCI (Field Weighted Citation Impact)
58
Refs
0.02
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
Ferroelectric and Piezoelectric Materials
Physical Sciences → Materials Science → Materials Chemistry
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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