MEMS with thin-film aerogel

Abstract

This paper reports the first successful incorporation of aerogel thin films for MEMS fabrication. We developed the photolithography procedures and various surface micromachining methods for highly porous thin films. The development is verified with micro bridges, cantilevers, and membranes made of aerogel thin films, completing the entire procedures for two aerogel thin films, silica and alumina. Also discussed will be the new opportunities that aerogel MEMS bring about.