JOURNAL ARTICLE

Thin Film Piezoelectrics for MEMS

Susan Trolier‐McKinstryPaul Muralt

Year: 2004 Journal:   Journal of Electroceramics Vol: 12 (1-2)Pages: 7-17   Publisher: Springer Science+Business Media
Keywords:
Materials science Piezoelectricity Lead zirconate titanate Ferroelectricity Microelectromechanical systems Phase boundary Piezoelectric coefficient Resonator Thin film Actuator Optoelectronics Composite material Dielectric Nanotechnology Electrical engineering Phase (matter)

Metrics

987
Cited By
20.43
FWCI (Field Weighted Citation Impact)
68
Refs
1.00
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
Ferroelectric and Piezoelectric Materials
Physical Sciences →  Materials Science →  Materials Chemistry
Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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