JOURNAL ARTICLE
Thin Film Piezoelectrics for MEMS
Susan Trolier‐McKinstryPaul Muralt
Year: 2004 Journal: Journal of Electroceramics Vol: 12 (1-2)Pages: 7-17 Publisher: Springer Science+Business Media
Keywords:
Materials science Piezoelectricity Lead zirconate titanate Ferroelectricity Microelectromechanical systems Phase boundary Piezoelectric coefficient Resonator Thin film Actuator Optoelectronics Composite material Dielectric Nanotechnology Electrical engineering Phase (matter)
Metrics
987
Cited By
20.43
FWCI (Field Weighted Citation Impact)
68
Refs
1.00
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
Ferroelectric and Piezoelectric Materials
Physical Sciences → Materials Science → Materials Chemistry
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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