TRAVELING WAVE ULTRASONIC MOTOR USING THIN-FILM PIEZOELECTRICS

Abstract

The authors report demonstrated bi-directional rotary motion of a millimeter scale traveling wave ultrasonic motor (TWUM) using solution deposited thin film lead zirconate titanate (PZT) and MEMS fabrication techniques.Rotation speeds of 2300 RPM have been achieved at 10V and less than 7mW in a 500μm thick, 2mm diameter rotor.Design, fabrication, and initial testing of the TWUM are described.The low-power, high-torque, zero-power off state rotary motors described here, could enable numerous applications in the fields of small-scale robotics, fuzing, and biomedical technology.