JOURNAL ARTICLE
Thin-film piezoelectric MEMS
Chang‐Beom EomSusan Trolier‐McKinstry
Year: 2012 Journal: MRS Bulletin Vol: 37 (11)Pages: 1007-1017 Publisher: Springer Nature
Keywords:
Microelectromechanical systems Materials science Piezoelectricity Engineering physics Nanotechnology Composite material Engineering
Metrics
303
Cited By
6.31
FWCI (Field Weighted Citation Impact)
82
Refs
0.98
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Ferroelectric and Piezoelectric Materials
Physical Sciences → Materials Science → Materials Chemistry
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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