JOURNAL ARTICLE

Thin-film piezoelectric MEMS

Chang‐Beom EomSusan Trolier‐McKinstry

Year: 2012 Journal:   MRS Bulletin Vol: 37 (11)Pages: 1007-1017   Publisher: Springer Nature
Keywords:
Microelectromechanical systems Materials science Piezoelectricity Engineering physics Nanotechnology Composite material Engineering

Metrics

303
Cited By
6.31
FWCI (Field Weighted Citation Impact)
82
Refs
0.98
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Ferroelectric and Piezoelectric Materials
Physical Sciences →  Materials Science →  Materials Chemistry
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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