Thin Film Piezoelectrics for MEMS

BOOK-CHAPTER

Year: 2005 Kluwer international series in electronic materials: science and technology Pages: 199-215 Publisher: Springer Nature

DOI: 10.1007/0-387-23319-9_10

Keywords:

Microelectromechanical systems Materials science Piezoelectricity Optoelectronics Composite material

Metrics

Cited By

3.88

FWCI (Field Weighted Citation Impact)

Refs

0.94

Citation Normalized Percentile

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