Recent Developments and Applications of TiN-Based Films Synthesized by Magnetron Sputtering

Sayan Atta; Uttamchand NarendraKumar; K. V. A. N. P. S. Kumar; D. P. Yadav; S. Dash

doi:10.1007/s11665-023-08273-x

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Recent Developments and Applications of TiN-Based Films Synthesized by Magnetron Sputtering

Sayan Atta Uttamchand NarendraKumar K. V. A. N. P. S. Kumar D. P. Yadav S. Dash

Year: 2023 Journal: Journal of Materials Engineering and Performance Vol: 32 (22)Pages: 9979-10015 Publisher: Springer Science+Business Media

DOI: 10.1007/s11665-023-08273-x

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Keywords:

Tin Materials science Sputter deposition Coating Sputtering Physical vapor deposition Titanium nitride Tribology Metallurgy High-power impulse magnetron sputtering Cavity magnetron Surface engineering Composite material Thin film Nitride Nanotechnology Layer (electronics)

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

GaN-based semiconductor devices and materials

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Recent Developments and Applications of TiN-Based Films Synthesized by Magnetron Sputtering

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