JOURNAL ARTICLE
Recent developments in pulsed magnetron sputtering
Robert ArnellPeter KellyJ. W. Bradley
Year: 2004 Journal: Surface and Coatings Technology Vol: 188-189 Pages: 158-163 Publisher: Elsevier BV
Keywords:
Materials science Ion Substrate (aquarium) Pulsed DC Atomic physics Duty cycle Biasing Sputtering Langmuir probe Coating Sputter deposition Voltage Optoelectronics Analytical Chemistry (journal) Thin film Plasma diagnostics Electrical engineering Nanotechnology Chemistry Physics
Metrics
102
Cited By
12.18
FWCI (Field Weighted Citation Impact)
6
Refs
0.99
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
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