Recent developments in inverted cylindrical magnetron sputtering

David A. Glocker; M.M. Romach; V. Lindberg

doi:10.1016/s0257-8972(01)01487-6

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JOURNAL ARTICLE

Recent developments in inverted cylindrical magnetron sputtering

David A. Glocker M.M. Romach V. Lindberg

Year: 2001 Journal: Surface and Coatings Technology Vol: 146-147 Pages: 457-462 Publisher: Elsevier BV

DOI: 10.1016/s0257-8972(01)01487-6

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Keywords:

Materials science Cavity magnetron Sputter deposition Coating Sputtering High-power impulse magnetron sputtering Planar Cathode Dielectric Optoelectronics Optics Composite material Thin film Nanotechnology Computer science Electrical engineering Engineering Physics

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Topics

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

GaN-based semiconductor devices and materials

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

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