JOURNAL ARTICLE

Recent developments in inverted cylindrical magnetron sputtering

David A. GlockerM.M. RomachV. Lindberg

Year: 2001 Journal:   Surface and Coatings Technology Vol: 146-147 Pages: 457-462   Publisher: Elsevier BV
Keywords:
Materials science Cavity magnetron Sputter deposition Coating Sputtering High-power impulse magnetron sputtering Planar Cathode Dielectric Optoelectronics Optics Composite material Thin film Nanotechnology Computer science Electrical engineering Engineering Physics

Metrics

19
Cited By
2.03
FWCI (Field Weighted Citation Impact)
5
Refs
0.86
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
GaN-based semiconductor devices and materials
Physical Sciences →  Physics and Astronomy →  Condensed Matter Physics

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