Inverted Cylindrical Magnetron Sputtering of Optical Coatings

M.M. Romach; G. Sherer; J. Eichenberger; John Lanzafame; David A. Glocker; M. Jaszcar; Bruce Rayner

doi:10.14332/svc14.proc.1815

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Inverted Cylindrical Magnetron Sputtering of Optical Coatings

M.M. Romach G. Sherer J. Eichenberger John Lanzafame David A. Glocker M. Jaszcar Bruce Rayner

Year: 2014 Journal: SVC ... Annual Technical Conference proceedings - Society of Vacuum Coaters. Technical Conference/Proceedings of the annual technical conference/Society of Vacuum Coaters Technical Conference proceedings Vol: 57 Pages: 233-238

DOI: 10.14332/svc14.proc.1815

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Keywords:

Materials science Sputter deposition Sputtering Optoelectronics Cavity magnetron Composite material Optics Thin film Nanotechnology Physics

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Surface Roughness and Optical Measurements

Physical Sciences → Engineering → Computational Mechanics

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Inverted Cylindrical Magnetron Sputtering of Optical Coatings

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