Recent developments in precision optical coatings prepared by cylindrical magnetron sputtering

Stefan Bruns; Michael Vergöhl; Tobias Zickenrott

doi:10.1117/12.2191351

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JOURNAL ARTICLE

Recent developments in precision optical coatings prepared by cylindrical magnetron sputtering

Stefan Bruns Michael Vergöhl Tobias Zickenrott

Year: 2015 Journal: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Vol: 9627 Pages: 96270N-96270N Publisher: SPIE

DOI: 10.1117/12.2191351

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Abstract

Paper 96270N, 7 S.

Keywords:

Sputter deposition Materials science Sputtering Optoelectronics Optics Optical coating Optical materials Cavity magnetron Computer science Thin film Nanotechnology Physics

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Topics

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

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