JOURNAL ARTICLE

Large area precision optical coatings by pulse magnetron sputtering

Peter FrachDaniel GloessThomas GoschurnyAndy DrescherU. HartungHagen BartzschAndreas HeisigHarald GruneLothar LeischnigSteffen LeischnigCarsten Bundesmann

Year: 2017 Journal:   Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Vol: 10181 Pages: 101810K-101810K   Publisher: SPIE

Abstract

Paper 101810K, 7 S.

Keywords:
Sputter deposition Materials science Deposition (geology) Optical coating Substrate (aquarium) Coating Cavity magnetron Optoelectronics Optics Sputtering Physical vapor deposition Thin film Nanotechnology Physics

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Citation History

Topics

Optical Coatings and Gratings
Physical Sciences →  Materials Science →  Surfaces, Coatings and Films
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Semiconductor Lasers and Optical Devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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