Large area precision optical coatings by pulse magnetron sputtering

Peter Frach; Daniel Gloess; Thomas Goschurny; Andy Drescher; U. Hartung; Hagen Bartzsch; Andreas Heisig; Harald Grune; Lothar Leischnig; Steffen Leischnig; Carsten Bundesmann

doi:10.1117/12.2262541

JOURNAL ARTICLE

Large area precision optical coatings by pulse magnetron sputtering

Peter Frach Daniel Gloess Thomas Goschurny Andy Drescher U. Hartung Hagen Bartzsch Andreas Heisig Harald Grune Lothar Leischnig Steffen Leischnig Carsten Bundesmann

Year: 2017 Journal: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Vol: 10181 Pages: 101810K-101810K Publisher: SPIE

DOI: 10.1117/12.2262541

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Abstract

Paper 101810K, 7 S.

Keywords:

Sputter deposition Materials science Deposition (geology) Optical coating Substrate (aquarium) Coating Cavity magnetron Optoelectronics Optics Sputtering Physical vapor deposition Thin film Nanotechnology Physics

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Topics

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Semiconductor Lasers and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

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