PACA2M magnetron sputtering optical coatings for large dimension

Abstract

In this paper, we will present recent achievements done with our large dimension magnetron sputtering coating machine that has been implemented by CILAS company in its premises in Aubagne. Such equipment called PACA2M (PulvérisAtion CAthodique de 2M) is an inline coating system that has been designed to ensure uniform coating on large optical components, up to 2 meters by 2 meters, 40 centimeters thick and to 1.5 ton weight. We will see how its wide variety of configurations based on seven 2.5 meters-long planar magnetrons, that may be powered in various modes (RF, MF, DC, ..) allows us producing complex optical functions such as multilayer dielectric mirrors, antireflective coatings and protected or enhanced metallic mirrors from ultraviolet to infrared applications. Moreover, an all-fibered broadband optical monitoring system developed in collaboration by Institut Fresnel is installed on this industrial machine and allows extremely accurate monitoring carried out on samples and fine characterization directly on components. Many spectral measurements and cosmetic results will be given that show that this equipment is well adapted for producing large optical components with high quality for various applications in the fields of industry, space or astronomy. In particular, for space application, PACA2M coating machine can be used to produce in a same batch all the required models as it is possible to simultaneously coat flight models, qualification witnesses and spare models. The stability of the performances in severe environmental conditions compatible with space environment will be illustrated with qualifications tests and characterizations.