JOURNAL ARTICLE
Recent advances in modulated pulsed power magnetron sputtering for surface engineering
Jianliang LinWilliam D. SproulJohn J. MooreZhili WuSabrina LeeRoman ChistyakovB. Abraham
Year: 2011 Journal: JOM Vol: 63 (6)Pages: 48-58 Publisher: Springer Science+Business Media
Keywords:
High-power impulse magnetron sputtering Sputter deposition Materials science Sputtering Cavity magnetron Optoelectronics Deposition (geology) Plasma Ionization Engineering physics Thin film Nanotechnology Ion Chemistry Engineering Physics
Metrics
94
Cited By
12.68
FWCI (Field Weighted Citation Impact)
57
Refs
0.99
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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