JOURNAL ARTICLE

Recent advances in modulated pulsed power magnetron sputtering for surface engineering

Keywords:
High-power impulse magnetron sputtering Sputter deposition Materials science Sputtering Cavity magnetron Optoelectronics Deposition (geology) Plasma Ionization Engineering physics Thin film Nanotechnology Ion Chemistry Engineering Physics

Metrics

94
Cited By
12.68
FWCI (Field Weighted Citation Impact)
57
Refs
0.99
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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