JOURNAL ARTICLE
Recent advances in magnetron sputtering technology
Year: 1998 Journal: Surface and Coatings Technology Vol: 100-101 Pages: 280-286 Publisher: Elsevier BV
Keywords:
Sputtering Sputter deposition Materials science Engineering physics Thin film High-power impulse magnetron sputtering Nanotechnology Metallurgy Engineering
Metrics
76
Cited By
1.95
FWCI (Field Weighted Citation Impact)
11
Refs
0.83
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
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