JOURNAL ARTICLE
Recent advances in magnetron sputtering
Year: 1999 Journal: Surface and Coatings Technology Vol: 112 (1-3)Pages: 170-176 Publisher: Elsevier BV
Keywords:
Materials science Sputter deposition Sputtering Aerospace Ceramic Metallurgy Corrosion Cavity magnetron Engineering physics Process engineering Nanotechnology Thin film Aerospace engineering Engineering
Metrics
164
Cited By
1.94
FWCI (Field Weighted Citation Impact)
20
Refs
0.84
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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