JOURNAL ARTICLE
Recent Advances in Sputtering Technology
Year: 1969 Journal: Shinku Vol: 12 (4)Pages: 116-129 Publisher: The Vacuum Society of Japan
Abstract
Nippon Electric Varian, Ltd
Keywords:
Sputtering Materials science Nanotechnology Thin film
Metrics
1
Cited By
0.00
FWCI (Field Weighted Citation Impact)
2
Refs
0.18
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Speech Recognition and Synthesis
Physical Sciences → Computer Science → Artificial Intelligence
Stuttering Research and Treatment
Social Sciences → Psychology → Clinical Psychology
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
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