JOURNAL ARTICLE

Recent Advances in Sputtering Technology

Zenjiro Oda

Year: 1969 Journal:   Shinku Vol: 12 (4)Pages: 116-129   Publisher: The Vacuum Society of Japan

Abstract

Nippon Electric Varian, Ltd

Keywords:
Sputtering Materials science Nanotechnology Thin film

Metrics

1
Cited By
0.00
FWCI (Field Weighted Citation Impact)
2
Refs
0.18
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Speech Recognition and Synthesis
Physical Sciences →  Computer Science →  Artificial Intelligence
Stuttering Research and Treatment
Social Sciences →  Psychology →  Clinical Psychology
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering

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