BOOK-CHAPTER

HPPMS – High Power Pulsed Magnetron Sputtering

Keywords:
High-power impulse magnetron sputtering Materials science Sputter deposition Sputtering Nanotechnology Thin film

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Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Boron and Carbon Nanomaterials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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