BOOK-CHAPTER
HPPMS – High Power Pulsed Magnetron Sputtering
Keywords:
High-power impulse magnetron sputtering Materials science Sputter deposition Sputtering Nanotechnology Thin film
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Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Boron and Carbon Nanomaterials Research
Physical Sciences → Materials Science → Materials Chemistry
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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