Reactive Magnetron Sputtering Deposition of Indium-Tin-Oxide Films for Photovoltaic Applications

A.R. Lagunas; M.J. Pérez-Ilzarbe; Luis M. Delgado

doi:10.1007/978-94-009-3817-5_111

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Reactive Magnetron Sputtering Deposition of Indium-Tin-Oxide Films for Photovoltaic Applications

A.R. Lagunas M.J. Pérez-Ilzarbe Luis M. Delgado

Year: 1987 Pages: 625-629

DOI: 10.1007/978-94-009-3817-5_111

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Keywords:

Materials science Sputtering Indium tin oxide Deposition (geology) Annealing (glass) Sputter deposition Electrical resistivity and conductivity Substrate (aquarium) Thin film Indium Tin Optoelectronics Analytical Chemistry (journal) Metallurgy Nanotechnology Chemistry Electrical engineering

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Reactive Magnetron Sputtering Deposition of Indium-Tin-Oxide Films for Photovoltaic Applications

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