JOURNAL ARTICLE
Excimer laser-induced etching of semiconductors and metals
Year: 1990 Journal: Microelectronics Reliability Vol: 30 (1)Pages: 203-203 Publisher: Elsevier BV
Keywords:
Excimer laser Etching (microfabrication) Semiconductor Laser Materials science Optoelectronics Excimer Optics Nanotechnology Physics Layer (electronics)
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Topics
Laser Material Processing Techniques
Physical Sciences → Engineering → Computational Mechanics
Laser-induced spectroscopy and plasma
Physical Sciences → Engineering → Mechanics of Materials
Advanced Materials Characterization Techniques
Physical Sciences → Engineering → Biomedical Engineering
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