Excimer-laser induced chemical etching of transition metals

C. O’Driscoll; Richard Dien Winfield; K. Khalfi; P.V. Kelly; G.M. Crean

doi:10.1016/s0169-4332(00)00775-3

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Excimer-laser induced chemical etching of transition metals

C. O’Driscoll Richard Dien Winfield K. Khalfi P.V. Kelly G.M. Crean

Year: 2000 Journal: Applied Surface Science Vol: 168 (1-4)Pages: 320-323 Publisher: Elsevier BV

DOI: 10.1016/s0169-4332(00)00775-3

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Keywords:

Etching (microfabrication) Excimer laser Partial pressure Isotropic etching Materials science Dry etching Laser Excimer Profilometer Metal Molybdenum Analytical Chemistry (journal) Chemistry Oxygen Metallurgy Nanotechnology Optics Layer (electronics) Environmental chemistry Surface finish

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

Excimer-laser induced chemical etching of transition metals

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