BOOK-CHAPTER
Excimer Laser Patterning And Etching Of Metals
Keywords:
Excimer laser Etching (microfabrication) Materials science Laser Nanotechnology Conductor Deposition (geology) Dry etching Electronics Machining Optoelectronics Optics Metallurgy Electrical engineering Engineering Composite material Geology
Metrics
3
Cited By
0.00
FWCI (Field Weighted Citation Impact)
11
Refs
0.09
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
Advancements in Photolithography Techniques
Physical Sciences → Engineering → Electrical and Electronic Engineering
Electron and X-Ray Spectroscopy Techniques
Physical Sciences → Materials Science → Surfaces, Coatings and Films
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