Fabrication of two-dimensional hybrid photonic crystals utilizing electron beam lithography

J. Stodolka; D. Nau; M. Frommberger; Ch. Zanke; Harald Gießen; Eckhard Quandt

doi:10.1016/j.mee.2004.12.056

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Fabrication of two-dimensional hybrid photonic crystals utilizing electron beam lithography

J. Stodolka D. Nau M. Frommberger Ch. Zanke Harald Gießen Eckhard Quandt

Year: 2005 Journal: Microelectronic Engineering Vol: 78-79 Pages: 442-447 Publisher: Elsevier BV

DOI: 10.1016/j.mee.2004.12.056

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Keywords:

Electron-beam lithography Materials science Lithography Optics Optoelectronics Nanodot Fabrication Stencil lithography Plasmon Next-generation lithography Resist Nanotechnology Layer (electronics)

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Photonic Crystals and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Plasmonic and Surface Plasmon Research

Physical Sciences → Engineering → Biomedical Engineering

Fabrication of two-dimensional hybrid photonic crystals utilizing electron beam lithography

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Citation History

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