Two-dimensional photonic crystals fabrication and close-packing by electron-beam lithography

D. E. Utkin; Dmitry A. Nasimov; А. В. Латышев

doi:10.1109/edm.2012.6310185

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Two-dimensional photonic crystals fabrication and close-packing by electron-beam lithography

D. E. Utkin Dmitry A. Nasimov А. В. Латышев

Year: 2012 Vol: 1 Pages: 47-50

DOI: 10.1109/edm.2012.6310185

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Abstract

It is brought an approach of creation and close-packing two-dimensional photonic crystals with given sizes of elements by the EBL. The main problems of formation these structures were considered.

Keywords:

Electron-beam lithography Fabrication Photonic crystal Lithography Materials science Photonics Optoelectronics Cathode ray Electron Optics Resist Nanotechnology Physics

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Photonic Crystals and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Two-dimensional photonic crystals fabrication and close-packing by electron-beam lithography

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