Fast nanopatterning of two-dimensional photonic crystals by electron beam lithography

T. Stomeo; A. Passaseo; R. Cingolani; Massimo De Vittorio

doi:10.1016/j.spmi.2004.08.019

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Fast nanopatterning of two-dimensional photonic crystals by electron beam lithography

T. Stomeo A. Passaseo R. Cingolani Massimo De Vittorio

Year: 2004 Journal: Superlattices and Microstructures Vol: 36 (1-3)Pages: 265-270 Publisher: Elsevier BV

DOI: 10.1016/j.spmi.2004.08.019

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Keywords:

Electron-beam lithography Resist Materials science Optics Lithography Cathode ray Photonic crystal Electron scattering Optoelectronics Scattering Photonics Electron Nanotechnology Physics

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Photonic Crystals and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Fast nanopatterning of two-dimensional photonic crystals by electron beam lithography

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