JOURNAL ARTICLE

Fabrication of Two-dimensional Nonlinear Photonic Crystal by Electron Beam Lithography

Chiang Huen KangZexiang ShenSing Hai Tang

Year: 2003 Journal:   MRS Proceedings Vol: 797   Publisher: Cambridge University Press
Keywords:
Materials science Electron-beam lithography Fabrication Optics Optoelectronics Lithography Wafer Photonic crystal Poling Scanning electron microscope Resist Ferroelectricity Nanotechnology Dielectric

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Topics

Photonic Crystals and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Photonic and Optical Devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Photorefractive and Nonlinear Optics
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
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