Fabrication of Two-dimensional Nonlinear Photonic Crystal by Electron Beam Lithography

Chiang Huen Kang; Zexiang Shen; Sing Hai Tang

doi:10.1557/proc-797-w5.10

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Fabrication of Two-dimensional Nonlinear Photonic Crystal by Electron Beam Lithography

Chiang Huen Kang Zexiang Shen Sing Hai Tang

Year: 2003 Journal: MRS Proceedings Vol: 797 Publisher: Cambridge University Press

DOI: 10.1557/proc-797-w5.10

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Keywords:

Materials science Electron-beam lithography Fabrication Optics Optoelectronics Lithography Wafer Photonic crystal Poling Scanning electron microscope Resist Ferroelectricity Nanotechnology Dielectric

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Photonic Crystals and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Photorefractive and Nonlinear Optics

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Fabrication of Two-dimensional Nonlinear Photonic Crystal by Electron Beam Lithography

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