Nitrogenated amorphous carbon films synthesized by electron cyclotron resonance plasma enhanced chemical vapor deposition

W.C Chan; Man‐Keung Fung; I. Bello; Chun‐Sing Lee; S.-T. Lee

doi:10.1016/s0925-9635(99)00017-5

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Nitrogenated amorphous carbon films synthesized by electron cyclotron resonance plasma enhanced chemical vapor deposition

W.C Chan Man‐Keung Fung I. Bello Chun‐Sing Lee S.-T. Lee

Year: 1999 Journal: Diamond and Related Materials Vol: 8 (8-9)Pages: 1732-1736 Publisher: Elsevier BV

DOI: 10.1016/s0925-9635(99)00017-5

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Keywords:

Elastic recoil detection Electron cyclotron resonance Carbon film Chemical vapor deposition Amorphous carbon Raman spectroscopy Materials science Analytical Chemistry (journal) Amorphous solid Thin film Plasma-enhanced chemical vapor deposition Carbon fibers Hydrogen Silicon Substrate (aquarium) Chemistry Nanotechnology Composite material Crystallography Metallurgy Optics Ion

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Nitrogenated amorphous carbon films synthesized by electron cyclotron resonance plasma enhanced chemical vapor deposition

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