Silicon-Carbon Alloys Synthesized by Electron Cyclotron Resonance Chemical Vapor Deposition

Mark B. Moran; Linda F. Johnson

doi:10.1557/proc-609-a23.2

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Silicon-Carbon Alloys Synthesized by Electron Cyclotron Resonance Chemical Vapor Deposition

Mark B. Moran Linda F. Johnson

Year: 2000 Journal: MRS Proceedings Vol: 609 Publisher: Cambridge University Press

DOI: 10.1557/proc-609-a23.2

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Keywords:

Materials science Chemical vapor deposition Analytical Chemistry (journal) Electron cyclotron resonance Fourier transform infrared spectroscopy Silicon Impurity Carbon fibers Chemical engineering Electron Nanotechnology Chemistry Metallurgy Organic chemistry Composite material Composite number

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Silicon-Carbon Alloys Synthesized by Electron Cyclotron Resonance Chemical Vapor Deposition

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