JOURNAL ARTICLE

Ion beam mixing for ohmic contact formation ton-Type GaAs

Jie ZhaoDylan Thompson

Year: 1988 Journal:   Journal of Electronic Materials Vol: 17 (3)Pages: 249-254   Publisher: Springer Science+Business Media
Keywords:
Ohmic contact Annealing (glass) Ion Materials science Auger Analytical Chemistry (journal) Ion beam mixing Contact resistance Ion beam Doping Ion implantation Chemistry Ion beam deposition Metallurgy Atomic physics Optoelectronics Nanotechnology

Metrics

5
Cited By
0.44
FWCI (Field Weighted Citation Impact)
12
Refs
0.68
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Integrated Circuits and Semiconductor Failure Analysis
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Semiconductor materials and interfaces
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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