OVERVIEW OF OHMIC-CONTACT FORMATION ON N-TYPE GaAs BY LASER AND ELECTRON BEAM ANNEALING

BOOK-CHAPTER

Year: 1980 Laser and Electron Beam Processing of Materials Pages: 467-480

DOI: 10.1016/b978-0-12-746850-1.50070-0

Keywords:

Ohmic contact Annealing (glass) Materials science Cathode ray Electron Optoelectronics Laser Optics Nanotechnology Metallurgy Physics Nuclear physics

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Laser-induced spectroscopy and plasma

Physical Sciences → Engineering → Mechanics of Materials

Plasma Diagnostics and Applications

Physical Sciences → Engineering → Electrical and Electronic Engineering