Scanning tunneling microscopy study of hydrogen-terminated Si(001) surfaces after wet cleaning

Kenta Arima; Kazuhiko Endo; Toshihiko Kataoka; Yasushi Oshikane; Hidemi Inoue; Yoichiro Mori

doi:10.1016/s0039-6028(99)01128-0

ScienceGate Book Chapters

JOURNAL ARTICLE

Scanning tunneling microscopy study of hydrogen-terminated Si(001) surfaces after wet cleaning

Kenta Arima Kazuhiko Endo Toshihiko Kataoka Yasushi Oshikane Hidemi Inoue Yoichiro Mori

Year: 2000 Journal: Surface Science Vol: 446 (1-2)Pages: 128-136 Publisher: Elsevier BV

DOI: 10.1016/s0039-6028(99)01128-0

Get Full-Text PDF Get Analytical Report

Keywords:

Ultrapure water Wet cleaning Scanning tunneling microscope Etching (microfabrication) Perpendicular Terrace (agriculture) Chemistry Infrared Surface reconstruction Fourier transform infrared spectroscopy Hydrogen Analytical Chemistry (journal) Surface (topology) Layer (electronics) Materials science Nanotechnology Optics Geometry

Metrics

Cited By

1.13

FWCI (Field Weighted Citation Impact)

Refs

0.77

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Surface and Thin Film Phenomena

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced Chemical Physics Studies

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Semiconductor Quantum Structures and Devices

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Scanning tunneling microscopy study of hydrogen-terminated Si(001) surfaces after wet cleaning

Metrics

Citation History

Topics

Related Documents

Atomically resolved scanning tunneling microscopy of hydrogen-terminated Si(001) surfaces after HF cleaning

Atomic structures of hydrogen-terminated Si(001) surfaces after wet cleaning by scanning tunneling microscopy

Scanning tunneling microscopy study of the hydrogen-terminated n- and p-type Si(001) surfaces

Scanning tunneling microscopy study of cleaning procedures for SiGe(001) surfaces

Scanning tunneling microscopy observation of hydrogen-terminated Si(001) surfaces after rinsing in ultrapure water with low dissolved oxygen concentration