JOURNAL ARTICLE

Scanning tunneling microscopy study of cleaning procedures for SiGe(001) surfaces

Keywords:
Scanning tunneling microscope X-ray photoelectron spectroscopy Materials science Analytical Chemistry (journal) Desorption Oxide Microscopy Wet cleaning Nanotechnology Adsorption Chemistry Chemical engineering Optics Metallurgy Environmental chemistry

Metrics

8
Cited By
0.44
FWCI (Field Weighted Citation Impact)
18
Refs
0.64
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Surface and Thin Film Phenomena
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Advanced Materials Characterization Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
© 2026 ScienceGate Book Chapters — All rights reserved.