Scanning tunneling microscopy study of cleaning procedures for SiGe(001) surfaces

D. E. Jones; J. P. Pelz; Y. H. Xie; P. J. Silvėrman; Eugene A. Fitzgerald

doi:10.1016/0039-6028(95)00929-9

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Scanning tunneling microscopy study of cleaning procedures for SiGe(001) surfaces

D. E. Jones J. P. Pelz Y. H. Xie P. J. Silvėrman Eugene A. Fitzgerald

Year: 1995 Journal: Surface Science Vol: 341 (1-2)Pages: L1005-L1010 Publisher: Elsevier BV

DOI: 10.1016/0039-6028(95)00929-9

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Keywords:

Scanning tunneling microscope X-ray photoelectron spectroscopy Materials science Analytical Chemistry (journal) Desorption Oxide Microscopy Wet cleaning Nanotechnology Adsorption Chemistry Chemical engineering Optics Metallurgy Environmental chemistry

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Surface and Thin Film Phenomena

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced Materials Characterization Techniques

Physical Sciences → Engineering → Biomedical Engineering

Scanning tunneling microscopy study of cleaning procedures for SiGe(001) surfaces

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