Fabrication Techniques for Submicron Devices

D. K. Ferry; Robert O. Grondin

doi:10.1007/978-1-4615-3284-2_2

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Fabrication Techniques for Submicron Devices

D. K. Ferry Robert O. Grondin

Year: 1991 Pages: 51-89

DOI: 10.1007/978-1-4615-3284-2_2

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Keywords:

Miniaturization Chip Integrated circuit Transistor Microprocessor Fabrication Computer science Process (computing) Electrical engineering Materials science Electronic engineering Nanotechnology Embedded system Computer hardware Engineering

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Integrated Circuits and Semiconductor Failure Analysis

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Fabrication Techniques for Submicron Devices

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