JOURNAL ARTICLE

DESIGN OF 4-CHANNEL POLYMER-BASED AWG DEMULTIPLEXER FOR DIRECT LASER WRITING LITHOGRAPHY

Dana SeyringerFelix WägerFadi DohnalJohann ZehetnerPeter GašoDušan Pudiš

Year: 2025 Journal:   Journal of International Scientific Publications : Materials, Methods & Technologies. Vol: 19 (1)Pages: 35-44
Keywords:
Lithography Laser Demultiplexer Maskless lithography Semiconductor laser theory Photolithography

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Topics

Semiconductor Lasers and Optical Devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced optical system design
Physical Sciences →  Engineering →  Biomedical Engineering
Laser Material Processing Techniques
Physical Sciences →  Engineering →  Computational Mechanics
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