JOURNAL ARTICLE
Electro-optic polymer channel waveguide fabrication using multiphoton direct laser writing
Abstract
An all-reflective multiphoton microscope has been used for direct laser lithography and photo-bleaching of SEO250 EO polymer using a 1550nm femtosecond laser to fabricate 4μm channel waveguides. Waveguide loss and cladding index change have also been investigated.
Keywords:
Materials science Laser Femtosecond Cladding (metalworking) Optics Fabrication Waveguide Lithography Optoelectronics Photolithography Polymer Refractive index Maskless lithography Electron-beam lithography Resist Nanotechnology
Metrics
6
Cited By
0.87
FWCI (Field Weighted Citation Impact)
7
Refs
0.74
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Nonlinear Optical Materials Studies
Physical Sciences → Engineering → Biomedical Engineering
Nanofabrication and Lithography Techniques
Physical Sciences → Engineering → Biomedical Engineering
Photonic and Optical Devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Related Documents
JOURNAL ARTICLE
Direct E-Beam writing of electro-optic polymer channel waveguides
Journal: AIP conference proceedings Year: 2004 Vol: 709 Pages: 427-428
JOURNAL ARTICLE
Polarization selective electro-optic polymer waveguide devices by direct electron beam writing
Haishan SunAntao ChenBenjamin C. OlbrichtJoshua A. DaviesPhilip A. SullivanYi LiaoZhengwei ShiJingdong LuoAlex K.‐Y. JenLarry R. Dalton
Journal: Optics Express Year: 2008 Vol: 16 (12)Pages: 8472-8472
JOURNAL ARTICLE
An azobenzene functionalized polymer for laser direct writing waveguide fabrication
Zhiqiang LiuNamkhun SrisanitXianjun KePengfei WuSangyup SongJame J. YangMichael R. Wang
Journal: Optics Communications Year: 2007 Vol: 273 (1)Pages: 94-98
BOOK-CHAPTER
Design and Fabrication of Electro-Optic Polymer Waveguide Devices
Year: 2020 Pages: 195-207