Design and Implementation of OPU-based Laser Direct Writing Lithography System

doi:10.2961/jlmn.2024.01.2004

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JOURNAL ARTICLE

Design and Implementation of OPU-based Laser Direct Writing Lithography System

Year: 2024 Journal: Journal of Laser Micro/Nanoengineering

DOI: 10.2961/jlmn.2024.01.2004

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Keywords:

Materials science Lithography Extreme ultraviolet lithography Laser Maskless lithography Nanotechnology Optoelectronics Optics Electron-beam lithography Resist Physics

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Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Optical Systems and Laser Technology

Physical Sciences → Engineering → Electrical and Electronic Engineering

Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Design and Implementation of OPU-based Laser Direct Writing Lithography System

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