JOURNAL ARTICLE

Growth mechanism of Ge2Sb2Te5 thin films by atomic layer deposition supercycles of GeTe and SbTe

Keywords:
Materials science Layer (electronics) Atomic layer deposition Thin film Deposition (geology) Mechanism (biology) Thin layer Layer by layer Nanotechnology Chemical engineering Physics

Metrics

1
Cited By
0.17
FWCI (Field Weighted Citation Impact)
53
Refs
0.42
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Phase-change materials and chalcogenides
Physical Sciences →  Materials Science →  Materials Chemistry
Chalcogenide Semiconductor Thin Films
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Nonlinear Optical Materials Studies
Physical Sciences →  Engineering →  Biomedical Engineering
© 2026 ScienceGate Book Chapters — All rights reserved.