Growth mechanism of Ge2Sb2Te5 thin films by atomic layer deposition supercycles of GeTe and SbTe

Okhyeon Kim; Yewon Kim; Hye-Lee Kim; Zhe Wu; Chang Yup Park; Dong-Ho Ahn; Bong Jin Kuh; Won‐Jun Lee

doi:10.1016/j.surfin.2024.105101

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Growth mechanism of Ge2Sb2Te5 thin films by atomic layer deposition supercycles of GeTe and SbTe

Okhyeon Kim Yewon Kim Hye-Lee Kim Zhe Wu Chang Yup Park Dong-Ho Ahn Bong Jin Kuh Won‐Jun Lee

Year: 2024 Journal: Surfaces and Interfaces Vol: 53 Pages: 105101-105101 Publisher: Elsevier BV

DOI: 10.1016/j.surfin.2024.105101

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Keywords:

Materials science Layer (electronics) Atomic layer deposition Thin film Deposition (geology) Mechanism (biology) Thin layer Layer by layer Nanotechnology Chemical engineering Physics

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Phase-change materials and chalcogenides

Physical Sciences → Materials Science → Materials Chemistry

Chalcogenide Semiconductor Thin Films

Physical Sciences → Engineering → Electrical and Electronic Engineering

Nonlinear Optical Materials Studies

Physical Sciences → Engineering → Biomedical Engineering

Growth mechanism of Ge2Sb2Te5 thin films by atomic layer deposition supercycles of GeTe and SbTe

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