Switch mode capacitive pressure sensors

Nabil Shalabi; Kyle Searles; Kenichi Takahata

doi:10.1038/s41378-022-00469-w

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Switch mode capacitive pressure sensors

Nabil Shalabi Kyle Searles Kenichi Takahata

Year: 2022 Journal: Microsystems & Nanoengineering Vol: 8 (1)Pages: 132-132 Publisher: Springer Nature

DOI: 10.1038/s41378-022-00469-w

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Keywords:

Capacitive sensing Pressure sensor Capacitor Materials science Capacitance Sensitivity (control systems) Surface micromachining SIGNAL (programming language) Electrical engineering Pressure measurement Electronic circuit Optoelectronics Electrode Voltage Electronic engineering Fabrication Engineering Computer science

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Topics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Semiconductor Lasers and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Switch mode capacitive pressure sensors

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