Touch mode capacitive pressure sensors for industrial applications

Abstract

The principle, simulation, design, characteristics and application of touch mode capacitive pressure sensors for industrial applications, including embedded monitoring of tire pressure are presented. In touch mode operation, the diaphragm of the capacitive pressure sensor touches the substrate structure. The advantages of touch mode of operation are: near linear output, large over-range pressure and robust structure that make it capable to withstand harsh industrial field environment. When properly packaged, the device can be used to measure fluid now, force, acceleration, and displacement, etc. in industrial applications.