JOURNAL ARTICLE
Touch Mode Capacitive Pressure Sensors for Industrial Applications
Abstract
The principle, simulation.design, characterstics and application of touch mode capacitive pressure sensors are presen ted.In touch mode operation.the diaphragm of the capacitive pressure sensor is touching the substrate structW'e.The advantages of this mode of operation are: near linear output, large over-range pressure and robust structure that make it capable to withstand harsh industrial field environment.
Keywords:
Capacitive sensing Pressure sensor Mode (computer interface) Diaphragm (acoustics) Electrical engineering Block cipher mode of operation Acoustics Substrate (aquarium) Proximity sensor Materials science Engineering Electronic engineering Computer science Mechanical engineering Physics
Metrics
18
Cited By
2.81
FWCI (Field Weighted Citation Impact)
1
Refs
0.90
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Sensor Technology and Measurement Systems
Physical Sciences → Computer Science → Computer Networks and Communications
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