Touch mode capacitive pressure sensors

Wen H. Ko; Qiang Wang

doi:10.1016/s0924-4247(99)00069-2

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JOURNAL ARTICLE

Touch mode capacitive pressure sensors

Wen H. Ko Qiang Wang

Year: 1999 Journal: Sensors and Actuators A Physical Vol: 75 (3)Pages: 242-251 Publisher: Elsevier BV

DOI: 10.1016/s0924-4247(99)00069-2

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Keywords:

Capacitive sensing Pressure sensor Mode (computer interface) Diaphragm (acoustics) Acoustics Electrical engineering Proximity sensor Electronic engineering Materials science Computer science Engineering Mechanical engineering Physics

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237

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2.73

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0.91

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Topics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Sensor Technology and Measurement Systems

Physical Sciences → Computer Science → Computer Networks and Communications

Advanced Sensor Technologies Research

Physical Sciences → Engineering → Biomedical Engineering

Touch mode capacitive pressure sensors

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Citation History

Topics

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