Electron-beam physical vapor deposition of diamond-like carbon coatings on Si substrates

Abstract

Diamond-like carbon (DLC) films were deposited at room temperature, 100°C, 200°C, 300°C and 400°C on Si substrates by means of electron-beam physical vapor deposition. The obtained coatings were characterized by Fourier Transform Infrared Spectroscopy (FTIR) and X-ray photoelectron spectroscopy (XPS). The FTIR results demonstrate the presence of sp3 vibrations which correspond to a diamond-like carbon phase. At lower temperatures sp2 C=C and C=N bonds corresponding to graphite-like phase were observed along with a mixture of sp2 and sp3 C-C vibrations.