JOURNAL ARTICLE

Ion Beam Assisted Deposition of Si-Diamond-Like Carbon Coatings on Large Area Substrates

Costas G. Fountzoulas

Year: 1995 Journal:   MRS Proceedings Vol: 396   Publisher: Cambridge University Press
Keywords:
Materials science Knoop hardness test Substrate (aquarium) Deposition (geology) Evaporation Composite material Diamond Ion beam-assisted deposition Silicon Coating Nozzle Indentation hardness Wafer Ion beam Carbon fibers Chemical vapor deposition Analytical Chemistry (journal) Nanotechnology Metallurgy Optics Beam (structure) Microstructure Composite number

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Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Ion-surface interactions and analysis
Physical Sciences →  Engineering →  Computational Mechanics
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