Ion Beam Assisted Deposition of Si-Diamond-Like Carbon Coatings on Large Area Substrates

Costas G. Fountzoulas

doi:10.1557/proc-396-569

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Ion Beam Assisted Deposition of Si-Diamond-Like Carbon Coatings on Large Area Substrates

Costas G. Fountzoulas

Year: 1995 Journal: MRS Proceedings Vol: 396 Publisher: Cambridge University Press

DOI: 10.1557/proc-396-569

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Keywords:

Materials science Knoop hardness test Substrate (aquarium) Deposition (geology) Evaporation Composite material Diamond Ion beam-assisted deposition Silicon Coating Nozzle Indentation hardness Wafer Ion beam Carbon fibers Chemical vapor deposition Analytical Chemistry (journal) Nanotechnology Metallurgy Optics Beam (structure) Microstructure Composite number

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Ion Beam Assisted Deposition of Si-Diamond-Like Carbon Coatings on Large Area Substrates

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