Ion Beam Deposition of Diamond-Like Coatings

Anton C. Greenwald; J. K. Hirvonen; N. K. Jaggi

doi:10.1557/proc-128-109

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Ion Beam Deposition of Diamond-Like Coatings

Anton C. Greenwald J. K. Hirvonen N. K. Jaggi

Year: 1988 Journal: MRS Proceedings Vol: 128 Publisher: Cambridge University Press

DOI: 10.1557/proc-128-109

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Keywords:

Materials science Wafer Carbon fibers Ion beam Secondary Ion Mass Spectroscopy Ion beam deposition Deposition (geology) Silicon Ion Nitrogen Argon Diamond-like carbon Chemical vapor deposition Composite material Metallurgy Nanotechnology Thin film Composite number Atomic physics

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Topics

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Ion Beam Deposition of Diamond-Like Coatings

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