JOURNAL ARTICLE

Ion Beam Deposition of Diamond-Like Coatings

Anton C. GreenwaldJ. K. HirvonenN. K. Jaggi

Year: 1988 Journal:   MRS Proceedings Vol: 128   Publisher: Cambridge University Press
Keywords:
Materials science Wafer Carbon fibers Ion beam Secondary Ion Mass Spectroscopy Ion beam deposition Deposition (geology) Silicon Ion Nitrogen Argon Diamond-like carbon Chemical vapor deposition Composite material Metallurgy Nanotechnology Thin film Composite number Atomic physics

Metrics

2
Cited By
0.39
FWCI (Field Weighted Citation Impact)
2
Refs
0.63
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Ion-surface interactions and analysis
Physical Sciences →  Engineering →  Computational Mechanics
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials

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